Duffy, R., Napolitani, E., Cristiano F.

2021 January

Laser Annealing Processes in Semiconductor Technology

Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors

Elsevier

Amsterdam

Published

0

978-0-12-820255-5

175

250

https://doi.org/10.1016/C2019-0-01254-X