D. Misra, S. De Gendt, K. Kita, K. Kakushima, P. Mascher, U. Cvelbar, F. Roozeboom, G. W. Hunter, L. J. Li, C. O'Dwyer

2020

October

Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences

ECS

Pennington, NJ

Published

1

nanoelectronics, plasma

Proceedings of PRiME 2020: Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences

1938-5862

1

https://iopscience.iop.org/issue/1938-5862/98/3

3

163

10.1149/issn.1938-5862

na