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Chen, WB, O'Sullivan, JA, McCarthy, KG;
2008
August
Dielectric Characterization For Novel High-K Thin Films Using Microwave Techniques
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This paper addresses the issue of novel high-k material thin film characterization through wafer-probe measurements and electromagnetic simulation (EM) of coplanar waveguides. The dielectric constant of an alumina substrate has been successfully extracted from s-parameter measurements of a coplanar waveguide. Verification lines on the impedance standard substrate (ISS) substrates have been used as a method to test a dielectric constant extraction technique and also to test the accuracy of EM simulations. The characteristic impedance and the effective dielectric constant for CPW are predicted using electromagnetic simulation..
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