Other

Farrell, RA, Cherkaoui, K, Petkov, N, Amenitsch, H, Holmes, JD, Hurley, PK, Morris, MA;

2007

April

Physical and Electrical Properties of Low Dielectric Constant Self-Assembled Mesoporous Silica Thin Films

Validated

1

()

The physical and electrical properties of self-assembled mesoporous silica thin films with defined 2D hexagonal porous architectures have been evaluated in the following study. Self-assembled mesoporous silica thin (MPS) films have been prepared by evaporation-induced self-assembly (EISA) methods using the triblock copolymer (C,Hz)r0b(C3H3)70(C,H,)ro6 (Pluronic F127 (R)). The MPS films exhibit remarkably low level leakage currents (1 x 10(-8)-1 x 10(-7) A/cm(2) at 1 MV/cm(1)) and high breakdown voltages (>3 MV/cm(1)). The films have dielectric constants of approximately 2.3, low dielectric loss factors of 0.01-0.03 and exhibit negligible frequency dispersion of dielectric constant between 100 kHz and 1 MHz. The effect of physisorbed water (humidity) upon the electrical properties of the films is also investigated using capacitance-voltage techniques. (C) 2007 Elsevier Ltd. All rights reserved..

759

763

DOI 10.1016/j.microrel.2007.01.020