Peer-Reviewed Journal Details
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Wang, N, O'Donnell, T, Roy, S, McCloskey, P, O'Mathuna, C;
Journal of Magnetism and Magnetic Materials
Micro-Inductors Integrated On Silicon For Power Supply On Chip
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This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of micro-inductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5 MHz and 38 nH/mm(2), respectively. The impact of seed layers and core overlap has been identified to be significant at high frequencies. Using the validated analytical model, the electrical performance of micro-inductors in a buck converter can be predicted and efficiency of 85.9 with a power density of 15.8 W/cm(2) can be achieved. (c) 2007 Elsevier B.V. All rights reserved..
DOI 10.1016/j.jmmm.2007.02.098
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